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1 Million Q-factor Demonstrated on Micro-glassblown Fused Silica Wineglass Resonators with Out-of-plane Electrostatic Transduction
| Content Provider | Semantic Scholar |
|---|---|
| Author | Senkal, Doruk Ahamed, Mohammed Jalal Askari, Sina Shkel, Andrei M. |
| Copyright Year | 2014 |
| Abstract | In this paper, for the first time, we report Q-factor over 1 million, on both modes, and high frequency symmetry (∆f/f ) of 132 ppm on wafer-level micro-glassblown 3-D fused silica wineglass resonators at a compact size of 7 mm diameter and center frequency of 105 kHz. In addition, we demonstrate for the first time, out-ofplane capacitive transduction on MEMS wineglass resonators. High Q-factor is enabled by a high aspect ratio, self-aligned glassblown stem structure, careful surface treatment of the perimeter area, and low internal loss fused silica material. Electrostatic transduction is enabled by detecting the spatial deformation of the 3-D wineglass structure using a new out-of-plane electrode architecture. To the best of our knowledge, work presented in this paper is the highest reported Q-factor on a degenerate mode device at 7 mm diameter or smaller. Micro-glassblowing may enable batch-fabrication of high performance fused silica wineglass gyroscopes at a significantly lower cost than their precision-machined macro-scale counterparts. |
| File Format | PDF HTM / HTML |
| DOI | 10.31438/trf.hh2014.18 |
| Alternate Webpage(s) | http://mems.eng.uci.edu/files/2014/06/018_0234.pdf |
| Alternate Webpage(s) | https://doi.org/10.31438/trf.hh2014.18 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
