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In Semconductor Device and a Semconductor Device Resulting Therefrom
| Content Provider | Semantic Scholar |
|---|---|
| Author | Yoon, Ki Tae |
| Copyright Year | 2017 |
| Abstract | ANNEAL CONDUCTIVE LAYER M.A. Kastner, Reviews of Modern Physics, vol. 64, No. 3, Jul. 1992, pp. 849–858. R.A. Smith et al., J. Appl. Phys. Vol. 81, No. 6, Mar. 15, 1997, pp. 2699–2703. S. Tiwari, et al., Appl. Phys. vol. 68, No. 10, Mar. 4, 1996, pp. 1377–1379. K. Yano, et al, IEEE Trans. Electron Devices, vol. 41, No. 9, 1994, pp. 1628–1638. A. Nakajima, et al., Appl. Phys. Vol. 70, No. 13, Mar. 31, 1997, pp. 1742–1744. S. Wolf, Silicon Processing for the VLSI Era. Vol. 2, chap. 8, pp. 567–574. K.K. Likharev, IBM J. Res. Development. Vol. 32 No. 1 Jan. 1988 pp. 144-158. K. Nakazato, et al., J. Appl. Phys., vol. 75, No. 10, May 15, 1994, pp. 5123–5134. D.J. Paul et al., Appl. Phys. Lett., vol. 63, No. 5, Aug. 2, 1993, pp. 631-632. D. Ali, et al., Appl. Phys. Lett., vol. 64, No. 16, Apr. 18, 1994, pp. 2119–2120. E. Leobandung, et al., Appl. PhyS. Lett, Vol. 67, No. 7, Aug. 14, 1995, pp. 938–940. K. Nakazato, et al., Appl. Phys, Lett, Vol. 61, No. 26, Dec. 28, 1992, pp. 3145–3147. Y. Takahashi, et al, IEDM 1994, p. 938-940. E. Leobandung, et al, IDEM 1995, p. 367-370. D. Leonard, et al., Appl. Phys. Lett. Vol. 63, No. 23, Dec. 6, 1993, pp. 3203-3205. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://patentimages.storage.googleapis.com/60/07/09/632cfad9586a19/US6194237.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
