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Apparatus and Method for Ncorporating Composition into Substrate Using Neutral Beams Cross-reference to Related Application
| Content Provider | Semantic Scholar |
|---|---|
| Author | Yeom, Geun-Young Kim, Sungwoo |
| Copyright Year | 2017 |
| Abstract | (KR); Sung-Woo Kim, Seoul (KR) An apparatus and method for processing a surface of a Sub strate using neutral beams are provided to repeatedly process (21) Appl. No.: 13/293,953 an oxide layer using the neutral beams having low energy to minimize electrical damage to the oxide layer and improve (22) Filed: Nov. 10, 2011 characteristics of the oxide layer. The apparatus is mounted in a plasma generating chamber, and includes: an ion beam Related U.S. Application Data generating gas inlet, which injects a gas for generating ion beams; an ion source, which generates the ion beams having (63) Continuation-in-part of application No. 12/031,540, a polarity from the gas introduced through the ion beam filed on Feb. 14, 2008, now abandoned. generating gas inlet; a grid assembly, which is installed on one end of the ion source: a reflector, which is aligned with the s s gn |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://patentimages.storage.googleapis.com/9c/e1/60/9a42a351e03bbb/US20120129347A1.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Patent |
