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P12 -Out-of-plane Translatory MEMS Actuator with Extraordinary Large Stroke for Optical Path Length Modulation in Miniaturized FTIR Spectrometers
| Content Provider | Semantic Scholar |
|---|---|
| Author | Sandner, Thilo Grasshoff, Thomas Schenk, Harald Kenda, Andreas |
| Copyright Year | 2011 |
| Abstract | A translatory MOEMS actuator with extraordinary large stroke – especially developed for fast optical path length modulation in miniaturized FTIR-spectrometers is presen¬ted. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1.2 mm is realized by means of a new suspension design of the comparative large mirror plate with 19.6 mm2 aperture using four pantographs. The MOEMS device is driven electro statically resonant and is manufactured in a CMOS compatible SOI process. Up to ± 600 μm amplitude (typically 1mm stroke) has been measured in vacuum of 30 Pa and 50 V driving voltage for an optimized pantograph design enabling reduced gas damping and higher driving efficiency. |
| Starting Page | 151 |
| Ending Page | 156 |
| Page Count | 6 |
| File Format | PDF HTM / HTML |
| DOI | 10.5162/irs11/ip12 |
| Alternate Webpage(s) | https://www.ama-science.org/proceedings/download/Zmx5 |
| Alternate Webpage(s) | https://doi.org/10.5162/irs11%2Fip12 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
