Multilayer Laue lenses as high-resolution x-ray optics

Content Provider	Semantic Scholar
Author	Maser, Joerg Stephenson, G. Brian Vogt, Stefan Yun, Wenbing Macrander, Albert Tiemen Kang, Hyon Chol Liu, Chian Conley, Ray
Copyright Year	2004
Abstract	Using Fresnel zone plates, a spatial resolution between 20 nm for soft x-rays and 70 nm for hard x-rays has been achieved. Improvement of the spatial resolution without loss of efficiency is difficult and incremental due to the fabrication challenges posed by the combination of small outermost zone width and high aspect ratios. We describe a novel approach for high-resolution x-ray focusing, a multilayer Laue lens (MLL). The MLL concept is a system of two crossed linear zone plates, manufactured by deposition techniques. The approach involves deposition of a multilayer with a graded period, sectioning it to the appropriate thickness, assembling the sections at the optimum angle, and using it in Laue geometry for focusing. The approach is particularly well suited for high-resolution focusing optics for use at high photon energy. We present a theory of the MLL using dynamic diffraction theory and Fourier optics.
File Format	PDF HTM / HTML
DOI	10.1117/12.560046
Alternate Webpage(s)	http://xrm.phys.northwestern.edu/research/pdf_papers/2004/maser_spie5539_2004.pdf
Alternate Webpage(s)	https://doi.org/10.1117/12.560046
Volume Number	5539
Journal	SPIE Optics + Photonics
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article