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METHOD OF FORMING PATTERNS FOR USE IN MANUFACTURING ELECTRONIC DEVICES BACKGROUND OF THE INVENTION 1. Field of the Invention
| Content Provider | Semantic Scholar |
|---|---|
| Author | Versteeg, Steven |
| Copyright Year | 2017 |
| Abstract | 4.533,624 8/1985 Sheppard ................................ 430/312 4,690,880 9/1987 Suzuki et al. . ... 430/313 5,279.921 1/1994 Onishi et al. . ... 430/270 5,292,614 3/1994 Ochiai et al. . ... 430/270 5,326,675 7/1994 Niki et al...... ... 430/326 5,403,695 4/1995 Hayase et al. .......................... 430/192 5,561,011 10/1996 Miyazaki et al. ........................... 430/7 5,585,217 12/1996 Oba ................ ... 430/191 5,679,497 10/1997 Kimura ... ... 430/296 5,686,223 11/1997 Cleeves ................................... 430/312 |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://patentimages.storage.googleapis.com/6b/97/c1/ce448bf660b299/US5814432.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |