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Monolithic Fabrication of InGaAs/GaAs/AlGaAs Multiple Wavelength Quantum Well Laser Diodes via Impurity-Free Vacancy Disordering Quantum Well Intermixing
| Content Provider | Semantic Scholar |
|---|---|
| Author | Qiao, Zhongliang Tang, Xiaohong Li, Xiang Bo, Baoxue Liu, Chong Yang Wang |
| Copyright Year | 2017 |
| Abstract | InGaAs/GaAs/AlGaAs multiple wavelength quantum well (QW) semiconductor laser diodes (LDs) have been fabricated by impurity-free vacancy disordering (IFVD) QW intermixing (QWI) method. The IFVD-QWI process was carried out by sputtering-depositing SiO2 mask layers on top of the complete InGaAs/GaAs/AlGaAs QW laser structure, emitting at 980 nm wavelength, and followed by a rapid thermal annealing at 880 °C for 60 s. The lasing wavelength of the devices fabricated from the intermixed wafer was blue-shifted with the increase of the mask layer thickness. The maximum emission wavelength blue shift of a processed as-cleaved laser reached 112 nm with the output-power more than 1000 mW. By using such an IFVD-QWI technique, multi-wavelength integrated LDs have also been successfully fabricated from a single chip. |
| Starting Page | 122 |
| Ending Page | 127 |
| Page Count | 6 |
| File Format | PDF HTM / HTML |
| DOI | 10.1109/JEDS.2017.2660531 |
| Volume Number | 5 |
| Alternate Webpage(s) | https://dr.ntu.edu.sg/bitstream/10356/80705/1/Monolithic%20Fabrication%20of%20InGaAsGaAsAlGaAs%20Multiple%20Wavelength%20Quantum%20Well%20Laser%20Diodes%20via%20Impurity-Free%20Vacancy%20DisorderingQuantum%20Well%20Intermixing.pdf |
| Alternate Webpage(s) | https://dr.ntu.edu.sg/bitstream/handle/10220/42443/Monolithic%20Fabrication%20of%20InGaAsGaAsAlGaAs%20Multiple%20Wavelength%20Quantum%20Well%20Laser%20Diodes%20via%20Impurity-Free%20Vacancy%20DisorderingQuantum%20Well%20Intermixing.pdf?isAllowed=y&sequence=1 |
| Alternate Webpage(s) | https://doi.org/10.1109/JEDS.2017.2660531 |
| Journal | IEEE Journal of the Electron Devices Society |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
