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The design of a high-temperature MEMS pressure sensor with integrated temperature compensation and signal-conditioning circuits
| Content Provider | Semantic Scholar |
|---|---|
| Author | Yao, Zong Li, Wangwang Zhang, Di-Ya Zhang, Bin Lei, Cheng Liang, Ting Xiong, Jijun |
| Copyright Year | 2017 |
| Abstract | Zong Yao, Wang-Wang Li, Di-Ya Zhang, Lei Qi, Bin Zhang, Cheng Lei, Xin Li, Ting Liang and Ji-Jun Xiong National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051, China; Key Laboratory for Instrumentation Science & Dynamic Measurement, North University of China, Ministry of Education, Taiyuan 030051, China; yaozong126@sina.com; 18434365707@163.com; 18234157832@163.com; qilei19850224@163.com; zb0003@126.com; leichengnuc@163.com; 2496136118@qq.com; email:liangtingnuc@163.com; xiongjijunnuc@126.com; |
| File Format | PDF HTM / HTML |
| DOI | 10.2991/eeeis-16.2017.51 |
| Alternate Webpage(s) | https://download.atlantis-press.com/article/25873921.pdf |
| Alternate Webpage(s) | https://doi.org/10.2991/eeeis-16.2017.51 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |