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Improved Memory Characteristics by NH 3 Post Annealing for ZrO 2 Based Charge Trapping Nonvolatile Memory
| Content Provider | Semantic Scholar |
|---|---|
| Author | Tang, Zhenjie Zhao, Dongqiu Zhu, Xinhua |
| Copyright Year | 2014 |
| Abstract | Copyright 2014 KIEEME. All rights reserved. This is an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/by-nc/3.0) which permits unrestricted noncommercial use, distribution, and reproduction in any medium, provided the original work is properly cited. Improved Memory Characteristics by NH3 Post Annealing for ZrO2 Based Charge Trapping Nonvolatile Memory |
| Starting Page | 16 |
| Ending Page | 19 |
| Page Count | 4 |
| File Format | PDF HTM / HTML |
| DOI | 10.4313/TEEM.2014.15.1.16 |
| Volume Number | 15 |
| Alternate Webpage(s) | http://ocean.kisti.re.kr/downfile/volume/kieeme/E1TEAO/2014/v15n1/E1TEAO_2014_v15n1_16.pdf |
| Alternate Webpage(s) | https://doi.org/10.4313/TEEM.2014.15.1.16 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |