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Portable inspection of precision surfaces by phase-shifting interferometry with automatic suppression of phase-shift errors
| Content Provider | Semantic Scholar |
|---|---|
| Author | Kong, In-Bok Kim, Seung-Woo |
| Copyright Year | 1995 |
| Abstract | One important issue in phase-shifting interferometry is to eliminate phase-shift errors so as to enhance achievable measurement accuracy. We propose a new phase-measuring algorithm that can identify the actual amounts of phase shifts directly from interlerograms without prior calibration. This is named the A-bucket algorithm and has the advantage of being inherently free from any phase-shift error that is constant across an interferogram. The main emphasis of this paper is given to a practicable application of the A-bucket algorithm to prove that accurate measurement is allowed in portable mode even in the presence of vibration. |
| Starting Page | 1400 |
| Ending Page | 1404 |
| Page Count | 5 |
| File Format | PDF HTM / HTML |
| DOI | 10.1117/12.201667 |
| Volume Number | 34 |
| Alternate Webpage(s) | http://koasas.kaist.ac.kr/bitstream/10203/1656/1/Portable%20Inspection%20of%20Precision%20Surfaces%20by%20Phase-Shfting%20Interferometry%20with%20Automatic%20Suppression%20of%20Phase%20Shift%20Errors.pdf |
| Alternate Webpage(s) | https://doi.org/10.1117/12.201667 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
