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Mems Process Simulation and Device Analysis for an Electro-statically Actuated Micro-mirror
| Content Provider | Semantic Scholar |
|---|---|
| Author | Finch, Nora Dutta, Sanghamitra Kuhn, Jonathan L. Marchetti, James Yamada, Tomonori |
| Copyright Year | 2001 |
| Abstract | MEMS (Micro-ElectroMechanical Systems) are key technologies for manufacturing in many industrial regions. Today's rapid growth and commercialization of MEMS requires equally rapid product development. Virtual manufacturing, which is usually referred to as computer aided engineering (CAE), enables this rapid product development especially in MEMS world, because computer simulations can address the effect of miniaturization. In this paper, the process of virtual manufacturing on the computer is described step by step through a micro-mirror device, and the numerical result by a CAE tool is compared to the experimental ones obtained from real manufacturing. |
| Starting Page | 337 |
| Ending Page | 342 |
| Page Count | 6 |
| File Format | PDF HTM / HTML |
| DOI | 10.1541/ieejsmas.121.337 |
| Volume Number | 121 |
| Alternate Webpage(s) | https://www.jstage.jst.go.jp/article/ieejsmas1995/121/6/121_6_337/_pdf |
| Alternate Webpage(s) | https://doi.org/10.1541/ieejsmas.121.337 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |