NDLI: Chemical Vapor Deposition of CuOx Films by Cul and O2: Role of Cluster Formation on Film Morphology

Content Provider	Scilit
Author	Hong, Lu-Sheng Komiyama, Hiroshi
Copyright Year	1991
Description	Journal: Journal of the American Ceramic Society
Ending Page	1604
Starting Page	1597
ISSN	2573508X
e-ISSN	15512916
DOI	10.1111/j.1151-2916.1991.tb07145.x
Journal	Journal of the American Ceramic Society
Issue Number	7
Volume Number	74
Language	English
Publisher	Wiley-Blackwell
Publisher Date	1991-07-01
Access Restriction	Open
Subject Keyword	Journal: Journal of the American Ceramic Society Cultural Studies Copper Oxide Chemical Vapor Deposition
Content Type	Text
Resource Type	Article
Subject	Ceramics and Composites Materials Chemistry

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