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Fabrication of Diffractive and Micro-optical Elements Using Microlens Projection Lithography
| Content Provider | Scilit |
|---|---|
| Author | Wu, M. -H. Whitesides, G. M. |
| Copyright Year | 2002 |
| Description | Journal: Advanced Materials |
| Ending Page | 1506 |
| Starting Page | 1502 |
| ISSN | 2573508X |
| e-ISSN | 15214095 |
| DOI | 10.1002/1521-4095%2820021016%2914%3A20%3C1502%3A%3Aaid-adma1502%3E3.0.co%3B2-m |
| Journal | Advanced Materials |
| Issue Number | 20 |
| Volume Number | 14 |
| Language | English |
| Publisher | Wiley-Blackwell |
| Publisher Date | 2002-10-16 |
| Access Restriction | Open |
| Subject Keyword | Journal: Advanced Materials Quantum Science and Technology Telecommunications Microlens Projection |
| Content Type | Text |
| Resource Type | Article |