NDLI: Anisotropic Warpage of Wafers with Anodized Porous Silicon Layers

Content Provider	Scilit
Author	Ayvazyan, G. E.
Copyright Year	1999
Description	Journal: Physica Status Solidi (a)
Related Links	http://onlinelibrary.wiley.com/doi/10.1002/(SICI)1521-396X(199910)175:23.0.CO;2-2/pdf
Ending Page	R8
Page Count	2
Starting Page	R7
ISSN	00318965
e-ISSN	1521396X
DOI	10.1002/%28sici%291521-396x%28199910%29175%3A2%3Cr7%3A%3Aaid-pssa99997%3E3.0.co%3B2-2
Journal	Physica Status Solidi (a)
Issue Number	2
Volume Number	175
Language	English
Publisher	Wiley-Blackwell
Publisher Date	1999-10-01
Access Restriction	Open
Subject Keyword	Journal: Physica Status Solidi (a) Characterization and Testing of Materials Porous Silicon Silicon Layers Anodized Porous Warpage of Wafers Anisotropic Warpage
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials

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Anisotropic Warpage of Wafers with Anodized Porous Silicon Layers