NDLI: Low-Temperature Synthesis of Diamond-like Carbon Films on Steel Substrates by Electron-Cyclotron-Resonance Plasma-Enhanced Chemical Vapor Deposition

Content Provider	Scilit
Author	Zhu, Shen Shahedipour, Fatemeh White, Henry W.
Copyright Year	2005
Description	Journal: Journal of the American Ceramic Society
Related Links	http://onlinelibrary.wiley.com/doi/10.1111/j.1151-2916.1998.tb02445.x/pdf
Ending Page	1044
Page Count	4
Starting Page	1041
ISSN	00027820
e-ISSN	15512916
DOI	10.1111/j.1151-2916.1998.tb02445.x
Journal	Journal of the American Ceramic Society
Issue Number	4
Volume Number	81
Language	English
Publisher	Wiley-Blackwell
Publisher Date	2005-01-20
Access Restriction	Open
Subject Keyword	Journal: Journal of the American Ceramic Society Amorphous Carbon Carbon Films Chemical Vapor Deposition Like Carbon Resonance Plasma Raman Spectra
Content Type	Text
Resource Type	Article
Subject	Ceramics and Composites Materials Chemistry

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Low-Temperature Synthesis of Diamond-like Carbon Films on Steel Substrates by Electron-Cyclotron-Resonance Plasma-Enhanced Chemical Vapor Deposition