NDLI: Charakterisierung von Nanopartikeln in CMP-Slurries der Halbleiterindustrie

Content Provider	Scilit
Author	Kuntzsch, T. Hollatz, M. Stintz, M. Ripperger, S.
Copyright Year	2002
Description	Journal: Chemie Ingenieur Technik
Ending Page	551
Starting Page	550
ISSN	2573508X
e-ISSN	15222640
DOI	10.1002/1522-2640%28200205%2974%3A5%3C550%3A%3Aaid-cite1111550%3E3.0.co%3B2-7
Journal	Chemie Ingenieur Technik
Issue Number	5
Volume Number	74
Language	English
Publisher	Wiley-Blackwell
Publisher Date	2002-05-01
Access Restriction	Open
Subject Keyword	Journal: Chemie Ingenieur Technik
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Chemistry Chemical Engineering

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Charakterisierung von Nanopartikeln in CMP-Slurries der Halbleiterindustrie