NDLI: Plasma-Resistant Dense Yttrium Oxide Film Prepared by Aerosol Deposition Process

Content Provider	Scilit
Author	Iwasawa, Junichi Nishimizu, Ryoichi Tokita, Masahiro Kiyohara, Masakatsu Uematsu, Keizo
Copyright Year	2007
Description	Journal: Journal of the American Ceramic Society
Related Links	http://onlinelibrary.wiley.com/doi/10.1111/j.1551-2916.2007.01738.x/pdf
Ending Page	2332
Page Count	6
Starting Page	2327
ISSN	00027820
e-ISSN	15512916
DOI	10.1111/j.1551-2916.2007.01738.x
Journal	Journal of the American Ceramic Society
Issue Number	8
Volume Number	90
Language	English
Publisher	Wiley-Blackwell
Publisher Date	2007-08-01
Access Restriction	Open
Subject Keyword	Journal: Journal of the American Ceramic Society Coatings and Films Surface Roughness Plasma Resistance
Content Type	Text
Resource Type	Article
Subject	Ceramics and Composites Materials Chemistry

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Plasma-Resistant Dense Yttrium Oxide Film Prepared by Aerosol Deposition Process