NDLI: The Reactive Ion Etching of Gallium Nitride by Methylchloride/Hydrogen

Content Provider	Scilit
Author	Dineen, M. Thomas, H. Humphreys, B. McMeekin, S. G.
Copyright Year	1999
Description	Journal: Physica Status Solidi (a)
Related Links	https://onlinelibrary.wiley.com/doi/pdf/10.1002/(SICI)1521-396X(199911)176:1<739::AID-PSSA739>3.0.CO;2-V
Ending Page	742
Page Count	4
Starting Page	739
ISSN	00318965
e-ISSN	1521396X
DOI	10.1002/%28sici%291521-396x%28199911%29176%3A1%3C739%3A%3Aaid-pssa739%3E3.0.co%3B2-v
Journal	Physica Status Solidi (a)
Issue Number	1
Volume Number	176
Language	English
Publisher	Wiley-Blackwell
Publisher Date	1999-11-22
Access Restriction	Open
Subject Keyword	Journal: Physica Status Solidi (a) Quantum Science and Technology Methylchloride/hydrogen
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials

Central Library (ISO-9001:2015 Certified)
Indian Institute of Technology Kharagpur
Kharagpur, West Bengal, India | PIN - 721302

See location in the Map
03222 282435
Mail: support@ndl.gov.in

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

The Reactive Ion Etching of Gallium Nitride by Methylchloride/Hydrogen