NDLI: Thermodynamic and Experimental Study of High-Purity Aluminum Nitride Formation from Aluminum Chloride by Chemical Vapor Deposition

Content Provider	Scilit
Author	Nickel, Klaus G. Riedel, Ralf Petzow, Günter
Copyright Year	1989
Description	Journal: Journal of the American Ceramic Society
Related Links	http://onlinelibrary.wiley.com/doi/10.1111/j.1151-2916.1989.tb05982.x/pdf
Ending Page	1810
Page Count	7
Starting Page	1804
ISSN	00027820
e-ISSN	15512916
DOI	10.1111/j.1151-2916.1989.tb05982.x
Journal	Journal of the American Ceramic Society
Issue Number	10
Volume Number	72
Language	English
Publisher	Wiley-Blackwell
Publisher Date	1989-10-01
Access Restriction	Open
Subject Keyword	Journal: Journal of the American Ceramic Society Applied Chemistry Chemical Vapor Deposition
Content Type	Text
Resource Type	Article
Subject	Ceramics and Composites Materials Chemistry

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Thermodynamic and Experimental Study of High-Purity Aluminum Nitride Formation from Aluminum Chloride by Chemical Vapor Deposition