NDLI: Parametric resonance of a repulsive force MEMS electrostatic mirror

Content Provider	Scilit
Author	Ozdogan, Mehmet Daeichin, Meysam Ramini, Abdallah Towfighian, Shahrzad
Copyright Year	2017
Description	Journal: Sensors and Actuators A: Physical
Related Links	https://orb.binghamton.edu/cgi/viewcontent.cgi?article=1016&context=mechanical_fac
Ending Page	31
Page Count	12
Starting Page	20
ISSN	09244247
DOI	10.1016/j.sna.2017.07.043
Journal	Sensors and Actuators A: Physical
Volume Number	265
Language	English
Publisher	Elsevier BV
Publisher Date	2017-10-01
Access Restriction	Open
Subject Keyword	Journal: Sensors and Actuators A: Physical
Content Type	Text
Resource Type	Article
Subject	Surfaces, Coatings and Films Metals and Alloys Instrumentation Electronic, Optical and Magnetic Materials Condensed Matter Physics Electrical and Electronic Engineering

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Parametric resonance of a repulsive force MEMS electrostatic mirror