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High Rate 3D Nanofabrication by AFM-based Ultrasonic Vibration Assisted Nanomachining
| Content Provider | Scilit |
|---|---|
| Author | Deng, Jia Dong, Jingyan Cohen, Paul |
| Copyright Year | 2016 |
| Description | Journal: Procedia Manufacturing |
| Related Links | https://core.ac.uk/download/pdf/82033425.pdf https://www.sciencedirect.com/science/article/pii/S2351978916301123/pdf?md5=63d36c35d6ebaa52cfaa02d9e44a044a&pid=1-s2.0-S2351978916301123-main.pdf |
| Ending Page | 1294 |
| Page Count | 12 |
| Starting Page | 1283 |
| ISSN | 23519789 |
| DOI | 10.1016/j.promfg.2016.08.100 |
| Journal | Procedia Manufacturing |
| Volume Number | 5 |
| Language | English |
| Publisher | Elsevier BV |
| Publisher Date | 2016-01-01 |
| Access Restriction | Open |
| Subject Keyword | Journal: Procedia Manufacturing Manufacturing Engineering 3d Nanomachining Tip-based Nanofabrication Atomic Force Microscope (afm) Ultrasonic Vibration Assisted Nanomachining |
| Content Type | Text |
| Resource Type | Article |