NDLI: Preparation and characterization of ALD deposited ZnO thin films studied for gas sensors

Content Provider	Scilit
Author	Boyadjiev, S. I. Georgieva, V. Yordanov, R. Raicheva, Z. Szilágyi, I. M.
Copyright Year	2016
Description	Journal: Applied Surface Science
Related Links	http://real.mtak.hu/39347/1/REAL_Manuscript_APSUSC_D_15_08554revision_2_u.pdf https://core.ac.uk/download/pdf/78471543.pdf
Ending Page	1235
Page Count	6
Starting Page	1230
ISSN	01694332
DOI	10.1016/j.apsusc.2016.06.007
Journal	Applied Surface Science
Volume Number	387
Language	English
Publisher	Elsevier BV
Publisher Date	2016-11-01
Access Restriction	Open
Subject Keyword	Journal: Applied Surface Science
Content Type	Text
Resource Type	Article
Subject	Chemistry Surfaces, Coatings and Films Condensed Matter Physics Surfaces and Interfaces

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Preparation and characterization of ALD deposited ZnO thin films studied for gas sensors