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A combined scanning tunnelling microscope and x-ray interferometer
| Content Provider | Scilit |
|---|---|
| Author | Yacoot, Andrew Kuetgens, Ulrich Koenders, Ludger Weimann, Thomas |
| Copyright Year | 2001 |
| Description | Journal: Measurement Science and Technology A monolithic x-ray interferometer made from silicon and a scanning tunnelling microscope have been combined and used to calibrate grating structures with periodicities of 100 nm or less. The x-ray interferometer is used as a translation stage which moves in discrete steps of 0.192 nm, the lattice spacing of the silicon (220) planes. Hence, movements are traceable to the definition of the metre and the nonlinearity associated with the optical interferometers used to measure displacement in more conventional metrological scanning probe microscopes (MSPMs) removed. |
| Related Links | http://iopscience.iop.org/article/10.1088/0957-0233/12/10/306/pdf |
| Ending Page | 1665 |
| Page Count | 6 |
| Starting Page | 1660 |
| ISSN | 09570233 |
| e-ISSN | 13616501 |
| DOI | 10.1088/0957-0233/12/10/306 |
| Journal | Measurement Science and Technology |
| Issue Number | 10 |
| Volume Number | 12 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2001-08-30 |
| Access Restriction | Open |
| Subject Keyword | Journal: Measurement Science and Technology Scanning Probe Microscope |
| Content Type | Text |
| Resource Type | Article |
| Subject | Applied Mathematics Instrumentation Engineering |
