NDLI: Abnormal glow discharge in crossed electric and magnetic fields in the presence of reactive gas

Content Provider	Scilit
Author	Luchkin, A. G. Kashapov, N. F. Luchkin, G. S.
Copyright Year	2013
Description	Journal: Journal of Physics: Conference Series The results of investigations of the low-temperature plasma at process of reactive magnetron sputtering of Ti target in the presence of reactive gas are described. Discharge volt-ampere characteristics for different schemas of reactive gas input are build. Optimal regimes of making strengthening coatings are defined. TiOx (0 < x < 2) strengthening coatings at plastics are made. Coatings showed high consumer qualities.
Related Links	http://iopscience.iop.org/article/10.1088/1742-6596/479/1/012019/pdf http://iopscience.iop.org/1742-6596/479/1/012019/pdf/1742-6596_479_1_012019.pdf
ISSN	17426588
e-ISSN	17426596
DOI	10.1088/1742-6596/479/1/012019
Journal	Journal of Physics: Conference Series
Volume Number	479
Language	English
Publisher	IOP Publishing
Publisher Date	2013-12-18
Access Restriction	Open
Subject Keyword	Journal: Journal of Physics: Conference Series Coatings and Films Crossed Electric Abnormal Glow Glow Discharge Magnetron Sputtering Reactive Gas Strengthening Coatings
Content Type	Text
Resource Type	Article
Subject	Physics and Astronomy

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