Fabrication of AlGaN nanostructures by nanolithography on ultraviolet LEDs grown on Si substrates

Content Provider	Scilit
Author	Ma, Chuanfei Feng, Meixin Wang, Jin Zhou, Rui Sun, Qian Liu, Jianxun Huang, Yingnan Gao, Hongwei Zhou, Yu Yang, Hui
Copyright Year	2019
Description	Journal: Nanotechnology AlGaN nanostructures have many applications because of theirs interesting and unique properties. Here we report a simple fabrication of AlGaN nanostructures by nanolithography on ultraviolet (UV) LEDs grown on Si substrates. We also studied the effects of various AlGaN nanostructure arrays on the performance of the UV (370 nm) thin-film LEDs with an embedded n-type contact. The output power of the UV LEDs with nanostructures was enhanced by 3.9 times as compared with the flat UV LEDs, while no penalty was induced for the electrical characteristics of the UV LEDs. Additionally, the far-field radiation pattern of the UV LEDs with nanostructures showed a much better directionality and a much stronger intensity than the flat UV LEDs, which would be of great benefits to directional UV curing applications.
Related Links	http://iopscience.iop.org/article/10.1088/1361-6528/aafd3d/pdf
ISSN	09574484
e-ISSN	13616528
DOI	10.1088/1361-6528/aafd3d
Journal	Nanotechnology
Issue Number	18
Volume Number	30
Language	English
Publisher	IOP Publishing
Publisher Date	2019-01-10
Access Restriction	Open
Subject Keyword	Journal: Nanotechnology Far-field Radiation Pattern
Content Type	Text
Resource Type	Article
Subject	Chemistry Nanoscience and Nanotechnology Mechanics of Materials Mechanical Engineering Bioengineering Electrical and Electronic Engineering