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High-Temperature Synthesis of Amorphous Carbon Nitride Thin Films with Modified Microstructure
| Content Provider | Scilit |
|---|---|
| Author | Yap, Yoke Khin Kida, Shinjiro Aoyama, Toshihiro Mori, Yusuke Sasaki, Takatomo |
| Copyright Year | 1998 |
| Description | Journal: Japanese Journal of Applied Physics Carbon nitride (CN) thin films were synthesized by RF plasma-pulsed laser deposition (PLD) technique at 600°C. Nitrogen incorporation of CN films was observed to increase significantly with the increase of negative d.c. self bias voltage. Fourier transform infrared (FTIR) spectra of these films were found to resolve into two distinguishable absorption bands centered at 1550 $cm^{-1}$ and 1200 $cm^{-1}$ in contrast to a single broad absorption band usually reported. With a coupled interpretation of X-ray photoelectron spectroscopy (XPS), FTIR and Raman spectroscopies, these films appeared to consist of tetrahedral N-s p$ ^{3}$ C and trigonal N-s p$ ^{2}$ C binding states with suppressed graphite-like CN microstructure. |
| Related Links | http://iopscience.iop.org/article/10.1143/JJAP.37.L746/pdf |
| ISSN | 00214922 |
| e-ISSN | 13474065 |
| DOI | 10.1143/jjap.37.l746 |
| Journal | Japanese Journal of Applied Physics |
| Issue Number | 6B |
| Volume Number | 37 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 1998-06-01 |
| Access Restriction | Open |
| Subject Keyword | Journal: Japanese Journal of Applied Physics Raman Spectroscopies |
| Content Type | Text |
| Resource Type | Article |
| Subject | Physics and Astronomy Engineering |