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PIC/MCC simulation of capacitively coupled discharges in helium: boundary effects
| Content Provider | Scilit |
|---|---|
| Author | Sun, Anbang Becker, Markus M. Loffhagen, Detlef |
| Copyright Year | 2018 |
| Description | Journal: Plasma Sources Science and Technology Particle-in-cell/Monte Carlo collision simulations considering one space and three velocity coordinates are applied to analyse the impact of surface properties on plasma parameters in low-pressure capacitively coupled radio-frequency discharges operating in α and γ mode, respectively. In particular, it is studied how electron reection and secondary electron emission contribute to the characteristics of sinusoidally excited, geometrically symmetric discharges under different operating conditions in the pressure range from 4 to 80Pa and how such discharges respond to asymmetric secondary electron emission at the electrodes. It is found that electron reection and secondary electron emission similarly control the important plasma parameters such as plasma density and mean electron energy at lower pressures ( α mode). Furthermore, different materials of the electrodes involving asymmetric secondary electron emission do not induce the formation of asymmetric discharge features under these conditions. When increasing the pressure, a transition from α to γ mode is observed which causes a decrease of the relevance of electron reection and an initiation of the secondary electron asymmetry effect, i.e., asymmetric secondary electron emission, results in asymmetric plasma distributions. This provides an additional option to control, e.g., the velocity distribution of ions at one of the electrodes. |
| Related Links | http://iopscience.iop.org/article/10.1088/1361-6595/aac30a/pdf |
| ISSN | 09630252 |
| e-ISSN | 13616595 |
| DOI | 10.1088/1361-6595/aac30a |
| Journal | Plasma Sources Science and Technology |
| Issue Number | 5 |
| Volume Number | 27 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2018-05-01 |
| Access Restriction | Open |
| Subject Keyword | Journal: Plasma Sources Science and Technology Nuclear Energy and Engineering Secondary Electron Emission |
| Content Type | Text |
| Resource Type | Article |
| Subject | Condensed Matter Physics |
