NDLI: Molecular beam system controlled by quadrupole mass spectrometer

Content Provider	Scilit
Author	Etienne, P. Massies, J. Linh, N. T.
Copyright Year	1977
Description	Journal: Journal of Physics E: Scientific Instruments A molecular beam epitaxy (MBE) apparatus is described in which some improvements over earlier systems have been achieved. An isolation valve permits the introduction of samples without disturbing the ultra-high vacuum system. The beam fluxes are controlled by a quadrupole mass spectrometer; by this means beams of gallium and arsenic can be kept constant to within 1 and 3% respectively.
Related Links	http://iopscience.iop.org/article/10.1088/0022-3735/10/11/018/pdf
Ending Page	1155
Page Count	3
Starting Page	1153
ISSN	00223735
DOI	10.1088/0022-3735/10/11/018
Journal	Journal of Physics E: Scientific Instruments
Issue Number	11
Volume Number	10
Language	English
Publisher	IOP Publishing
Publisher Date	1977-11-01
Access Restriction	Open
Subject Keyword	Journal: Journal of Physics E: Scientific Instruments Quadrupole Mass Spectrometer Molecular Beam Epitaxy Ultra High Vacuum
Content Type	Text
Resource Type	Article
Subject	Physics and Astronomy Instrumentation Engineering Materials Science

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