NDLI: Mechanical variation of plasma potential, electron temperature and plasma density

Content Provider	Scilit
Author	Hershkowitz, N. Cho, Moo-Hyun Pruski, J.
Copyright Year	1992
Description	Journal: Plasma Sources Science and Technology It is shown that the plasma potential and electron temperature of capacitively coupled RF plasmas, confined in a multi-dipole plasma device, can be varied by changing the position of a grounded plate located in the surface multi-dipole magnetic field.
Related Links	http://iopscience.iop.org/article/10.1088/0963-0252/1/2/003/pdf
Ending Page	93
Page Count	7
Starting Page	87
ISSN	09630252
e-ISSN	13616595
DOI	10.1088/0963-0252/1/2/003
Journal	Plasma Sources Science and Technology
Issue Number	2
Volume Number	1
Language	English
Publisher	IOP Publishing
Publisher Date	1992-05-01
Access Restriction	Open
Subject Keyword	Journal: Plasma Sources Science and Technology Electron Temperature
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics

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