NDLI: Diameter modulation of 3D nanostructures in focused electron beam induced deposition using local electric fields and beam defocus

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Diameter modulation of 3D nanostructures in focused electron beam induced deposition using local electric fields and beam defocus

Content Provider	Scilit
Author	Pablo-Navarro, Javier Sangiao, Soraya Magén, César de Teresa, José María
Copyright Year	2019
Description	Journal: Nanotechnology Focused Electron Beam Induced Deposition (FEBID) is a leading nanolithography technique in terms of resolution and the capability for three-dimensional (3D) growth of functional nanostructures. However, FEBID still presents some limitations with respect to the precise control of the dimensions of the grown nano-objects as well as its use on insulating substrates. In the present work, we overcome both limitations by employing electrically-biased metal structures patterned on the surface of insulating substrates. Such patterned metal structures serve for charge dissipation and also allow the application of spatially-dependent electric fields. We demonstrate that such electric fields can dramatically change the dimensions of the growing 3D nanostructures by acting on the primary electron beam and the generated secondary electrons. In the performed experiments, the diameter of Pt-C and W-C vertical nanowires grown on quartz, MgO and amorphous SiO2 is tuned by application of moderate voltages (up to 200 V) on the patterned metal microstructures during growth, achieving diameters as small as 50 nm. We identify two competing effects arising from the generated electric fields: a slight change in the primary beam focus point and a strong action on the secondary electrons. Beam defocus is exploited to achieve the in-situ modulation of the diameter of 3D FEBID structures during growth.
Related Links	https://iopscience.iop.org/article/10.1088/1361-6528/ab423c/pdf
ISSN	09574484
e-ISSN	13616528
DOI	10.1088/1361-6528/ab423c
Journal	Nanotechnology
Issue Number	50
Volume Number	30
Language	English
Publisher	IOP Publishing
Publisher Date	2019-09-06
Access Restriction	Open
Subject Keyword	Journal: Nanotechnology
Content Type	Text
Resource Type	Article
Subject	Chemistry Nanoscience and Nanotechnology Mechanics of Materials Mechanical Engineering Bioengineering Electrical and Electronic Engineering

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