NDLI: Ammonia, acetone and ethanol gas sensing characteristics of CuO thin films grown by sputtering

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Ammonia, acetone and ethanol gas sensing characteristics of CuO thin films grown by sputtering

Content Provider	Scilit
Author	Jacob, Anju Anna Balakrishnan, L. Meher, S. R. Sivacoumar, R. Shambavi, K. Alex, Z. C.
Copyright Year	2018
Description	Journal: Iop Conference Series: Materials Science and Engineering Here, we have reported the sensing characteristics of CuO thin films towards volatile gases like ammonia, acetone and ethanol. The CuO films were deposited on glass substrate by RF magnetron sputtering at 350 °C and 400 °C. The characteristics of CuO thin films grown at both temperatures were analyzed using X-ray diffractometer (XRD), UV-Vis spectrometer, atomic force microscope (AFM), scanning electron microscope (SEM) and Fourier transform infrared spectrometer (FTIR). The thin films showed mesoporous morphology with average crystallite size of 78 nm and 36 nm for films grown at 350 °C and 400 °C, respectively. As the film grown at 400 °C showed better properties, it has been preferred for the gas sensing analysis. Gas sensing properties of the film towards different concentration (50-250 ppm) of ammonia, acetone and ethanol were studied in chemi-resistive mode. As expected, an increase in resistance with concentration of gases was observed due to the p-type nature of CuO thin films. Further, the film showed comparatively better sensitivity towards ethanol than other gases.
Related Links	http://iopscience.iop.org/article/10.1088/1757-899X/360/1/012062/pdf
ISSN	17578981
e-ISSN	1757899X
DOI	10.1088/1757-899x/360/1/012062
Journal	Iop Conference Series: Materials Science and Engineering
Issue Number	1
Volume Number	360
Language	English
Publisher	IOP Publishing
Publisher Date	2018-10-23
Access Restriction	Open
Subject Keyword	Journal: Iop Conference Series: Materials Science and Engineering Condensed Matter Physics Cuo Thin Films Acetone and Ethanol Gas Sensing
Content Type	Text
Resource Type	Article

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