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Super Smooth Modification of $Al_{2}O_{3}$Ceramic Substrate by High Temperature Glaze of $CaO–Al_{2}O_{3}–SiO_{2}$System
| Content Provider | Scilit |
|---|---|
| Author | Zhang, Jihua Zhen, Shanxue Yang, Lijun Lou, Feizhi Chen, Hongwei Yang, Chuanren |
| Copyright Year | 2011 |
| Description | Journal: Japanese Journal of Applied Physics The rough surface of ceramic substrate is an obstacle for the scale down of line-width for thin film passive integrated devices (PID). In this paper, a modification method for $Al_{2}O_{3}$ ceramic substrate with super smooth in surface was proposed. Coating a layer of $CaO–Al_{2}O_{3}–SiO_{2}$ (CAS) glass was performed to flat the rough surface of alumina substrate by sol–gel method. It was found that addition of 0.06% $V_{2}O_{5}$ can inhibit the recrystallization of the glaze. The root-mean-square (RMS) roughness of the glazed substrates reached a surprising flatness as small as 0.5 nm, and its melting temperature is higher than 1300 °C. This substrate with super flatness and high temperature endurance may be promising for high performance thin film devices. |
| Related Links | http://iopscience.iop.org/article/10.1143/JJAP.50.015803/pdf |
| ISSN | 00214922 |
| e-ISSN | 13474065 |
| DOI | 10.7567/jjap.50.015803 |
| Journal | Japanese Journal of Applied Physics |
| Issue Number | 1R |
| Volume Number | 50 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2011-01-01 |
| Access Restriction | Open |
| Subject Keyword | Journal: Japanese Journal of Applied Physics Rough Surface Ceramic Substrate |
| Content Type | Text |
| Resource Type | Article |
| Subject | Physics and Astronomy Engineering |
