NDLI: Design of a phase shifting interferometer in the EUV for high precision metrology

Content Provider	Scilit
Author	Capeluto, Maria Marconi, M. C. Iemmi, C.
Copyright Year	2011
Description	Journal: Journal of Physics: Conference Series We present the design of phase shift interferometer for the extreme ultraviolet (EUV) that will be used with the illumination provided by a table top Ne-like Ar laser emitting at 46.9 nm. We develop a model that computes the beam propagation trough the instrument, taking into account the influence of the fluctuations from shot-to-shot of the pulsed EUV laser on the retrieved wavefront.
Related Links	http://digital.bl.fcen.uba.ar/Download/paper/paper_17426588_v274_n1_p_Capeluto.pdf http://iopscience.iop.org/article/10.1088/1742-6596/274/1/012026/pdf
ISSN	17426588
e-ISSN	17426596
DOI	10.1088/1742-6596/274/1/012026
Journal	Journal of Physics: Conference Series
Issue Number	1
Volume Number	274
Language	English
Publisher	IOP Publishing
Publisher Date	2011-01-01
Access Restriction	Open
Subject Keyword	Journal: Journal of Physics: Conference Series Phase Shift Extreme Ultraviolet
Content Type	Text
Resource Type	Article
Subject	Physics and Astronomy

Central Library (ISO-9001:2015 Certified)
Indian Institute of Technology Kharagpur
Kharagpur, West Bengal, India | PIN - 721302

See location in the Map
03222 282435
Mail: support@ndl.gov.in

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in