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High-resolution x-ray diffraction strain-stress analysis of GaN/sapphire heterostructures
| Content Provider | Scilit |
|---|---|
| Author | Harutyunyan, V. S. Aivazyan, A. P. Weber, E. R. Kim, Y. Park, Y. Subramanya, S. G. |
| Copyright Year | 2001 |
| Description | Journal: Journal of Physics D: Applied Physics On the basis of high-resolution x-ray diffraction measurements, the strain-stress analysis of $GaN/(00.1)α-Al_{2}O_{3}$ heteroepitaxial structures grown by molecular beam epitaxy is performed. The deformation state of the heteroepitaxial structures is investigated depending on the relative content of N in the $Ga_{1-x}N_{x}$ buffer layer with the given thickness (=4 nm) and growth conditions. Using the extrapolating technique, the a- and c-lattice parameters, as well as the in-plane and out-of-plane strains (of the order of $-10^{-3}$ and $10^{-4}$, respectively) are determined for GaN epilayers from θ-2θ x-ray diffraction spectra. For GaN epilayers, both the biaxial in-plane and in-depth strains (of the order of $-10^{-3}$ and $10^{-3}$, respectively) and the hydrostatic strain component (of the order of $-10^{-4}$) are extracted from the measured strains. It is supposed that the hydrostatic strain in the epilayers is caused by native point defects. The maximal level for the biaxial stress in the GaN epilayer, -1.3 GPa, is achieved for the sample with a relative content, x = 0.377, of N in the $Ga_{1-x}N_{x}$ buffer layer. |
| Related Links | http://iopscience.iop.org/article/10.1088/0022-3727/34/10A/308/pdf |
| Ending Page | A39 |
| Page Count | 5 |
| Starting Page | A35 |
| ISSN | 00223727 |
| e-ISSN | 13616463 |
| DOI | 10.1088/0022-3727/34/10a/308 |
| Journal | Journal of Physics D: Applied Physics |
| Issue Number | 10A |
| Volume Number | 34 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2001-05-03 |
| Access Restriction | Open |
| Subject Keyword | Journal: Journal of Physics D: Applied Physics X Ray Diffraction Molecular Beam Epitaxy Lattice Parameter |
| Content Type | Text |
| Resource Type | Article |
| Subject | Surfaces, Coatings and Films Acoustics and Ultrasonics Condensed Matter Physics Electronic, Optical and Magnetic Materials |
