NDLI: Diagnostics of argon cluster ion beam for materials treatment

Content Provider	Scilit
Author	Korobeishchikov, N. G. Nikolaev, I. V. Roenko, M. A.
Copyright Year	2018
Description	Journal: Journal of Physics: Conference Series The important parameters for materials surface processing by a gas cluster ions are the mass composition, total energy and energy per atom in the cluster, which depends on the ion beam charge state. The purpose of this work is an experimental characterization of argon cluster ion beam, based on an original time-of-flight technique. The mean sizes of the cluster ions obtained from the measured mass spectra are compared with the mean sizes of the primary neutral clusters. By analyzing the mass spectra at different electron ionization current, the average charge state of cluster ion beam is evaluated.
Related Links	http://iopscience.iop.org/article/10.1088/1742-6596/1115/3/032016/pdf
ISSN	17426588
e-ISSN	17426596
DOI	10.1088/1742-6596/1115/3/032016
Journal	Journal of Physics: Conference Series
Issue Number	3
Volume Number	1115
Language	English
Publisher	IOP Publishing
Publisher Date	2018-11-27
Access Restriction	Open
Subject Keyword	Journal: Journal of Physics: Conference Series
Content Type	Text
Resource Type	Article
Subject	Physics and Astronomy

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