NDLI: Determination of threading dislocation density in hetero-epitaxial layers by diffuse X-ray scattering

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Determination of threading dislocation density in hetero-epitaxial layers by diffuse X-ray scattering

Content Provider	Scilit
Author	Koppensteiner, E. Schuh, A. Bauer, G. Holy, V. Watson, G. P. Fitzgerald, E. A.
Copyright Year	1995
Description	Journal: Journal of Physics D: Applied Physics An approach for the determination of dislocation densities in epilayers is presented, which is based on the analysis of the two-dimensional intensity distribution of diffuse X-ray scattering measured by triple-axis X-ray reciprocal-space mapping. A new formalism for the simulation of experimental iso-intensity contours is used, which assumes a defect model based on random elastic deformation due to the strain fields of dislocations. The simulation of the two-dimensional intensity contours yields the random strain field from which the energy density stored in the epilayer due to the presence of dislocations is calculated. On the other hand, the self-energy of threading dislocations is calculated assuming 60 degrees (for diamond or zincblende structure) or screw-type dislocations. The threading dislocation density is obtained by dividing the energy density by this self-energy. The method was applied for the analysis of SiGe layers grown on compositionally graded SiGe alloy buffer layers. The diffuse X-ray scattering analysis reproduces the increase in the dislocation densities in the buffer with higher Ge grading rates and yields upper limits for the threading dislocation densities.
Related Links	http://iopscience.iop.org/article/10.1088/0022-3727/28/4A/022/pdf
Ending Page	A119
Page Count	6
Starting Page	A114
ISSN	00223727
e-ISSN	13616463
DOI	10.1088/0022-3727/28/4a/022
Journal	Journal of Physics D: Applied Physics
Issue Number	4A
Volume Number	28
Language	English
Publisher	IOP Publishing
Publisher Date	1995-04-14
Access Restriction	Open
Subject Keyword	Journal: Journal of Physics D: Applied Physics
Content Type	Text
Resource Type	Article
Subject	Surfaces, Coatings and Films Acoustics and Ultrasonics Condensed Matter Physics Electronic, Optical and Magnetic Materials

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