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Fabrication of Three-Dimensional Photonic Crystal Device for Terahertz Wave
| Content Provider | Scilit |
|---|---|
| Author | Tamamori, Kenji Ouchi, Toshihiko Itsuji, Takeaki Wang, Shi Nan Kurosaka, Ryoji Ono, Haruhito |
| Copyright Year | 2007 |
| Description | Journal: Japanese Journal of Applied Physics We have fabricated a simple-cubic-lattice photonic crystal (PhC) device based on high-resistivity silicon in the terahertz (THz) range by micro-electro-mechanical system (MEMS) techniques. The lattice constant of the three-dimensional (3D) PhC device is 120 µm, resulting in a photonic band gap (PBG) centered at 1 THz. The 3D PhC device was constructed by stacking ten 120-µm-thick chips with periodic pillars and holes patterned respectively on both of their sides by Si deep reactive ion etching. By THz time-domain spectroscopy, the PBG of the device was observed between 0.83 and 1.17 THz in the Γ–Z direction with a transmittance attenuation of about 35 dB, which is in good agreement with a numerical calculation result. |
| Related Links | http://iopscience.iop.org/article/10.1143/JJAP.46.L654/pdf |
| Ending Page | L656 |
| Page Count | 3 |
| Starting Page | L654 |
| ISSN | 00214922 |
| e-ISSN | 13474065 |
| DOI | 10.1143/jjap.46.l654 |
| Journal | Japanese Journal of Applied Physics |
| Issue Number | No. 26 |
| Volume Number | 46 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2007-06-29 |
| Access Restriction | Open |
| Subject Keyword | Journal: Japanese Journal of Applied Physics Public, Environmental and Occupational Health Statistics and Probability |
| Content Type | Text |
| Resource Type | Article |
| Subject | Physics and Astronomy Engineering |
