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Sub-wavelength Ripple Formation on Silicon Induced by Femtosecond Laser Radiation
| Content Provider | Scilit |
|---|---|
| Author | Ming, Zhou Dong-Qing, Yuan Wei, Zhang Jian, Shen Bao-Jia, Li Juan, Song Lan, Cai |
| Copyright Year | 2009 |
| Description | Journal: Chinese Physics Letters Periodic microstructures on silicon bulk are formed by the irradiation of the femtosecond laser with the laser wavelength of 800 nm and the pulse length of 130 fs. We investigate the surface periodic ripple structures produced by femtosecond laser treatment. The effects of feedrate of sample, v, on laser-induced surface topography are studied. We find that the femtosecond laser produce periodic ripples of the sub-micron level on silicon surface. At the same time, we realize the optimal conditions to produce these surface structures. When choosing N A = 0.3, and v = 2000 μm/s or 3000 μm/s, we find a series of periodic-structure ripples where the spacing is about 120 nm and the width is about 450 nm. The experimental results indicate that femtosecond laser treatment can produce line arrays on the sub-micron level, which is a positive factor for fabricating grating and other optical applications in nanoscales. |
| Related Links | http://iopscience.iop.org/article/10.1088/0256-307X/26/3/037901/pdf |
| ISSN | 0256307X |
| e-ISSN | 17413540 |
| DOI | 10.1088/0256-307x/26/3/037901 |
| Journal | Chinese Physics Letters |
| Issue Number | 3 |
| Volume Number | 26 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2009-02-23 |
| Access Restriction | Open |
| Subject Keyword | Journal: Chinese Physics Letters Quantum Science and Technology Femtosecond Laser |
| Content Type | Text |
| Resource Type | Article |
| Subject | Physics and Astronomy |
