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Pt and $RuO_{2}$ Bottom Electrode Effects on $Pb(Zr,Ti)O_{3}$ Memory Capacitors
| Content Provider | Scilit |
|---|---|
| Author | Jeong, Young Park Min Moon, Sang Il Jeong, Kyu Won Kim, Sung Hoon Song, Joon Tae Yi, Junsin Yi Junsin |
| Copyright Year | 1999 |
| Description | Journal: Japanese Journal of Applied Physics This study examines the effects of bottom electrodes for metal ferroelectric metal (MFM) capacitor applications. We investigated the following parameters of bottom electrodes and $Pb(Zr_{0.53}Ti_{0.47})O_{3}$ (PZT) thin films: substrate temperature, rf power, gas flow rate, $Ar/O_{2}$ ratio, electrode material, and post-annealing effect. Bottom electrodes grown at 300°C for Pt and 200°C for $RuO_{2}$ exhibited a film resistivity of $10^{-4}$ Ω·cm, had a surface roughness of approximately 55 Å and a preferred crystal orientation. Rapid thermal annealing (RTA) treatments on a Pt electrode at 600°C for 30 s improved the resistivity to $5×10^{-6}$ Ω·cm and generated the (111) preferred crystal orientation. PZT films exhibited a strong PZT (101) peak for an optimized Pt bottom electrode and (111), (200), (112) planes without preferred PZT orientations for the $RuO_{2}$ electrode. A well-fabricated Pd/PZT/Pt capacitor showed a leakage current density in the order of $6×10^{-5}$ $A/cm^{2}$, a dielectric constant (ε$ _{r}$) of 365, a remanent polarization (P$ _{r}$) of 27 $µC/cm^{2}$, and a coercive field (E$ _{c}$) of 50.5 kV/cm. This paper discusses the bottom electrode properties as well as their recommended conditions in memory device applications of thin-film PZT capacitors. |
| Related Links | http://iopscience.iop.org/article/10.1143/JJAP.38.6801/pdf |
| ISSN | 00214922 |
| e-ISSN | 13474065 |
| DOI | 10.1143/jjap.38.6801 |
| Journal | Japanese Journal of Applied Physics |
| Issue Number | 12R |
| Volume Number | 38 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 1999-12-01 |
| Access Restriction | Open |
| Subject Keyword | Journal: Japanese Journal of Applied Physics Surface Roughness Bottom Electrode |
| Content Type | Text |
| Resource Type | Article |
| Subject | Physics and Astronomy Engineering |
