NDLI: MEMS thermal gas flow sensor with self-test function

Please wait, while we are loading the content...

MEMS thermal gas flow sensor with self-test function

Content Provider	Scilit
Author	Ke, Wenjian Liu, Meng Li, Tie Wang, Yuelin
Copyright Year	2019
Description	Journal: Journal of Micromechanics and Microengineering In this paper, the design, fabrication and characterization of a MEMS thermal gas flow sensor with self-test function are presented. The flow sensor is composed of a platinum heater and thermopiles, where the heater is served as a heat source and the thermopiles are used for voltage output. In order to improve the performance of the flow sensor, the heavily doped N/P-polysilicon is utilized to form the thermocouple and $XeF_{2}$ front-side isotropic etching is adopted to realize thermal isolation of the device. At the same time, the effects of the chip position in the gas channel and heater voltage on device performance are also studied from both experiment and simulation. Moreover, a self-test method and corresponding test system based on the thermal flow sensor are proposed, which use an equivalent heater voltage to simulate the gas flow rate for monitoring the dynamic response of the flow sensor to the gas. This method is simple and effective compared with traditional methods for detecting the performance flow sensors. In addition, the basic output performance of the flow sensor using nitrogen as the test gas is characterized. The experimental results show that the flow sensor owns a relatively high sensitivity of 123.006 mV/(m/s) (no amplification), a low response time of about 250 ms and good accuracy of ±1.97%.
Related Links	https://iopscience.iop.org/article/10.1088/1361-6439/ab4aef/pdf
ISSN	09601317
e-ISSN	13616439
DOI	10.1088/1361-6439/ab4aef
Journal	Journal of Micromechanics and Microengineering
Issue Number	12
Volume Number	29
Language	English
Publisher	IOP Publishing
Publisher Date	2019-10-04
Access Restriction	Open
Subject Keyword	Journal: Journal of Micromechanics and Microengineering
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Mechanics of Materials Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in