NDLI: History and current status of commercial pulsed laser deposition equipment

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History and current status of commercial pulsed laser deposition equipment

Content Provider	Scilit
Author	Greer, James A.
Copyright Year	2013
Description	Journal: Journal of Physics D: Applied Physics This paper will review the history of the scale-up of the pulsed laser deposition (PLD) process from small areas ∼1 cm2 up to 10 m2 starting in about 1987. It also documents the history of commercialization of PLD as various companies become involved in selling fully integrated laser deposition tools starting in 1989. The paper will highlight the current state of the art of commercial PLD equipment for R&D that is available on the market today from mainstream vendors as well as production-oriented applications directed at piezo-electric materials for microelectromechanical systems and high-temperature superconductors for coated-conductor applications. The paper clearly demonstrates that considerable improvements have been made to scaling this unique physical vapour deposition process to useful substrate sizes, and that commercial deposition equipment is readily available from a variety of vendors to address a wide variety of technologically important thin-film applications.
Related Links	http://iopscience.iop.org/article/10.1088/0022-3727/47/3/034005/pdf http://iopscience.iop.org/0022-3727/47/3/034005/pdf/0022-3727_47_3_034005.pdf
ISSN	00223727
e-ISSN	13616463
DOI	10.1088/0022-3727/47/3/034005
Journal	Journal of Physics D: Applied Physics
Issue Number	3
Volume Number	47
Language	English
Publisher	IOP Publishing
Publisher Date	2013-12-23
Access Restriction	Open
Subject Keyword	Journal: Journal of Physics D: Applied Physics Manufacturing Engineering Pulsed Laser Deposition
Content Type	Text
Resource Type	Article
Subject	Surfaces, Coatings and Films Acoustics and Ultrasonics Condensed Matter Physics Electronic, Optical and Magnetic Materials

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