NDLI: Stress characteristics of suspended porous silicon microstructures on silicon

Content Provider	Scilit
Author	Anestou, K. Papadimitriou, D. Tsamis, C. Nassiopoulou, A. G.
Copyright Year	2005
Description	Journal: Journal of Physics: Conference Series
Related Links	http://iopscience.iop.org/article/10.1088/1742-6596/10/1/076/pdf
Ending Page	312
Page Count	4
Starting Page	309
ISSN	17426588
e-ISSN	17426596
DOI	10.1088/1742-6596/10/1/076
Journal	Journal of Physics: Conference Series
Volume Number	10
Language	English
Publisher	IOP Publishing
Publisher Date	2005-01-01
Access Restriction	Open
Subject Keyword	Journal: Journal of Physics: Conference Series Raman Spectroscopy Structural Stability
Content Type	Text
Resource Type	Article
Subject	Physics and Astronomy

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Stress characteristics of suspended porous silicon microstructures on silicon