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In-plane InSb nanowires grown by selective area molecular beam epitaxy on semi-insulating substrate
| Content Provider | Scilit |
|---|---|
| Author | Desplanque, Ludovic Bucamp, Alexandre Troadec, David Patriarche, Gilles Wallart, Xavier |
| Copyright Year | 2018 |
| Description | Journal: Nanotechnology In-plane InSb nanostructures are grown on a semi-insulating GaAs substrate using an AlGaSb buffer layer covered with a patterned SiO2 mask and selective area molecular beam epitaxy. The shape of these nanostructures is defined by the aperture in the silicon dioxide layer used as a selective mask thanks to the use of an atomic Hydrogen flux during the growth. Transmission electron microscopy reveals that the mismatch accommodation between InSb and GaAs is obtained in two steps via the formation of an array of misfit dislocations both at the AlGaSb buffer layer/GaAs and at the InSb nanostructures/AlGaSb interfaces. Several micron long in-plane nanowires can be achieved as well as more complex nanostructures such as branched nanowires. The electrical properties of the material are investigated by the characterization of an InSb nanowire MOSFET down to 77K. The resulting room temperature field-effect mobility values are comparable with those reported on back-gated MOSFETs based on InSb nanowires obtained by Vapor Liquid Solid (VLS) growth or electrodeposition. This growth method paves the way to the fabrication of complex InSb-based nanostructures. |
| Related Links | http://iopscience.iop.org/article/10.1088/1361-6528/aac321/pdf |
| ISSN | 09574484 |
| e-ISSN | 13616528 |
| DOI | 10.1088/1361-6528/aac321 |
| Journal | Nanotechnology |
| Issue Number | 30 |
| Volume Number | 29 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2018-05-08 |
| Access Restriction | Open |
| Subject Keyword | Journal: Nanotechnology Molecular Beam Epitaxy Selective Area Growth |
| Content Type | Text |
| Resource Type | Article |
| Subject | Chemistry Nanoscience and Nanotechnology Mechanics of Materials Mechanical Engineering Bioengineering Electrical and Electronic Engineering |
