NDLI: Sputtering of the 1020 AISI steel in abnormal glow discharge

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Sputtering of the 1020 AISI steel in abnormal glow discharge

Content Provider	Scilit
Author	Zúñiga, J. A. García Santos, A. Sarmiento Luna, B. Álvarez
Copyright Year	2017
Description	Journal: Journal of Physics: Conference Series In all material treated in Sbnormal Glow Discharge (AGD) the phenomenon of sputtering occurs. In this work we study the sputtering suffered at different temperatures by AISI 1020 steel subjected to a DC discharge in two types of atmospheres. The steel samples were previously sanded until obtaining mirror brightness and subjected to the AGD plasma in the gaseous atmospheres of $H_{2}$ and Ar. The temperature for each sputtering process was set in the range of 420°C to 600°C. In these samples the mass variation was measured and the yield sputtering processes was determined. Next, the simulation of the sputtering process was performed in the SRIM/TRIM 2008 software, by adjusting sputtering yield computational computations to those experimentally measured, in order to determine the energy with which the responsible ions of the sputtering collide with studied target.
Related Links	http://iopscience.iop.org/article/10.1088/1742-6596/935/1/012019/pdf
ISSN	17426588
e-ISSN	17426596
DOI	10.1088/1742-6596/935/1/012019
Journal	Journal of Physics: Conference Series
Issue Number	1
Volume Number	935
Language	English
Publisher	IOP Publishing
Publisher Date	2017-12-28
Access Restriction	Open
Subject Keyword	Journal: Journal of Physics: Conference Series Nuclear Energy and Engineering Sputtering Process Glow Discharge Sputtering Yield
Content Type	Text
Resource Type	Article
Subject	Physics and Astronomy

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