On electron energy distribution function measurements in microwave discharges sustained by propagating surface waves

Content Provider	Scilit
Author	Grosse, S. Schluter, H. Tatarova, Elena
Copyright Year	1994
Description	Journal: Plasma Sources Science and Technology The possibility of measuring the electron energy distribution function in microwave discharges sustained by the field of propagating surface waves via a second derivative technique is demonstrated. The influence of different measuring probe orientations (axial or radial with respect to the discharge axis) on the measured electrodynamic surface wave parameters and distribution functions is examined. The electron energy distribution functions obtained by axial and radial probe orientation show different behaviour. Significant influence of the presence of probes on the space distribution of the radial electric field component outside the discharge is observed. The results show that it is more appropriate to use a radially orientated probe for diagnostics in microwave discharges created by surface waves.
Related Links	http://iopscience.iop.org/article/10.1088/0963-0252/3/4/012/pdf
Ending Page	555
Page Count	11
Starting Page	545
ISSN	09630252
e-ISSN	13616595
DOI	10.1088/0963-0252/3/4/012
Journal	Plasma Sources Science and Technology
Issue Number	4
Volume Number	3
Language	English
Publisher	IOP Publishing
Publisher Date	1994-11-01
Access Restriction	Open
Subject Keyword	Journal: Plasma Sources Science and Technology Microscopic Research Surface Wave Distribution Function Electric Field
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics