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Mechanical Conversion for High-Throughput TEM Sample Preparation
| Content Provider | Scilit |
|---|---|
| Author | Kendrick, Anthony B. Moore, Thomas M. Zaykova-Feldman, Lyudmila |
| Copyright Year | 2006 |
| Description | Journal: Journal of Physics: Conference Series This paper presents a novel method of direct mechanical conversion from lift-out sample to TEM sample holder. The lift-out sample is prepared in the FIB using the in-situ liftout Total Release™ method. The mechanical conversion is conducted using a mechanical press and one of a variety of TEM coupons, including coupons for both top-side and back-side thinning. The press joins a probe tip point with attached TEM sample to the sample coupon and separates the complete assembly as a 3mm diameter TEM grid, compatible with commercially available TEM sample holder rods. This mechanical conversion process lends itself well to the high through-put requirements of in-line process control and to materials characterization labs where instrument utilization and sample security are critically important. |
| Related Links | http://iopscience.iop.org/article/10.1088/1742-6596/26/1/054/pdf |
| Ending Page | 230 |
| Page Count | 4 |
| Starting Page | 227 |
| ISSN | 17426588 |
| e-ISSN | 17426596 |
| DOI | 10.1088/1742-6596/26/1/054 |
| Journal | Journal of Physics: Conference Series |
| Issue Number | 1 |
| Volume Number | 26 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2006-02-22 |
| Access Restriction | Open |
| Subject Keyword | Journal: Journal of Physics: Conference Series Manufacturing Engineering High Throughput Process Control Sample Preparation |
| Content Type | Text |
| Resource Type | Article |
| Subject | Physics and Astronomy |
