NDLI: Etched silicon vibrating sensor

Content Provider	Scilit
Author	Greenwood, J. C.
Copyright Year	1984
Description	Journal: Journal of Physics E: Scientific Instruments The development of a frequency output absolute pressure sensor is described. The sensor element is etched out of single crystal silicon using boron doping to define the shape of the mechanical resonators on one side of a wafer and the diaphragm on the other.
Related Links	http://iopscience.iop.org/article/10.1088/0022-3735/17/8/007/pdf
Ending Page	652
Page Count	3
Starting Page	650
ISSN	00223735
DOI	10.1088/0022-3735/17/8/007
Journal	Journal of Physics E: Scientific Instruments
Issue Number	8
Volume Number	17
Language	English
Publisher	IOP Publishing
Publisher Date	1984-08-01
Access Restriction	Open
Subject Keyword	Journal: Journal of Physics E: Scientific Instruments
Content Type	Text
Resource Type	Article
Subject	Physics and Astronomy Instrumentation Engineering Materials Science

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Etched silicon vibrating sensor