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Optical properties of HfOx (x < 2) films grown by ion beam sputtering-deposition method
| Content Provider | Scilit |
|---|---|
| Author | Gerasimova, Alina Aliev, Vladimir Kruchinin, Vladimir N. Badmaeva, Irena Voronkovskii, Vitalii Bortnikov, Sergey |
| Copyright Year | 2018 |
| Description | Journal: Materials Research Express The optical properties of the HfOx films of different chemical composition (x≤2) deposited by ion beam sputtering-deposition (IBSD) method were studied. Spectral dependencies of refractive index n(λ) and extinction coefficient k(λ) were determined with ellipsometry in λ=250-1100 nm wavelength region. The x values (i.e. [O]/[Hf] ratio) for the films were derived from X-ray photoelectron spectroscopy (XPS) data. The spectral dependences of optical constants n(λ) and k(λ) were found to undergo radical changes with x=1.78-1.82. The films with x1 with the metallic-like behavior of optical constants spectral dependences. The films with x>1.82 were found to be transparent, with k=0 and n(λ) being well approximated by a Cauchy polynomial dependence for dielectrics. Using a sample with a gradient of x, it was established that the transition from the metallic to the dielectric-like behavior of the optical constants occurs not smoothly, but is discontinuous. A sharp jump in the optical constants is observed at x ≈ 1.8. According to XPS data, the transparent films were found to consist of two components only: HfO2 and Hf4O7 suboxide. Cauchy polynomial coefficients for Hf4O7 suboxide and HfO2 were found by using the Bruggeman effective medium approximation. |
| Related Links | http://iopscience.iop.org/article/10.1088/2053-1591/aae594/pdf |
| ISSN | 20531591 |
| e-ISSN | 20531591 |
| DOI | 10.1088/2053-1591/aae594 |
| Journal | Materials Research Express |
| Issue Number | 1 |
| Volume Number | 6 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2018-10-02 |
| Access Restriction | Open |
| Subject Keyword | Journal: Materials Research Express Applied Physics Condensed Matter Physics |
| Content Type | Text |
| Resource Type | Article |
| Subject | Surfaces, Coatings and Films Metals and Alloys Biomaterials Electronic, Optical and Magnetic Materials Polymers and Plastics |
