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Effect of pre-annealing process on semiconductor-to-metal transition properties of vanadium oxide thin films
| Content Provider | Scilit |
|---|---|
| Author | Liang, Jiran Yang, Zhibin Zhao, Yirui Guo, Jinbang |
| Copyright Year | 2019 |
| Description | Journal: Materials Research Express Vanadium oxide (VOX) thin films were fabricated on the (0001) sapphire substrates by pre-annealing process and subsequent rapid thermal annealing (RTA). The XRD results showed that the intensity of VO2 peak was enhanced and the V2O5 peak was not much changed when pre-annealing process was added before RTA. In addition, the pre-annealing process lowered the roughness of thin film and made film surface smooth and uniform. After pre-annealing process and subsequent RTA, the semiconductor-to-metal transition (SMT) amplitude increased from 21.8 to 160 and the phase transition temperature (TC) of the film reduced to the minimum of 50℃. Moreover, the increase rate of solar modulation ability reached 61%. This study demonstrates that the pre-annealing enhanced the SMT amplitude and solar modulation ability, and decreased the TC of VOX thin films simultaneously. Therefore, it is a promising way to fabricate thermochromic VOX thin films for smart windows. |
| Related Links | https://iopscience.iop.org/article/10.1088/2053-1591/ab4a49/pdf |
| ISSN | 20531591 |
| e-ISSN | 20531591 |
| DOI | 10.1088/2053-1591/ab4a49 |
| Journal | Materials Research Express |
| Issue Number | 11 |
| Volume Number | 6 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2019-09-01 |
| Access Restriction | Open |
| Subject Keyword | Journal: Materials Research Express Pre Annealing Process |
| Content Type | Text |
| Resource Type | Article |
| Subject | Surfaces, Coatings and Films Metals and Alloys Biomaterials Electronic, Optical and Magnetic Materials Polymers and Plastics |