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Laser micromachining
| Content Provider | Scilit |
|---|---|
| Copyright Year | 2003 |
| Description | Although material ablation by pulsed light sources has been studied since the invention of the laser [1, 2], reports in 1982 of polymers etched by UV excimer lasers [3, 4] stimulated widespread investigations aimed at using the process for micromachining. In the intervening years scientific and industrial research in this field has proliferated to a staggering extent-probably spurred on by the remarkably small features that can be etched and replicated with little or no apparent damage to surrounding un-irradiated regions of material. Manufacturing industry now uses laser micromachining in many high-tech application areas for which microfabrication is an enabling technology. Book Name: Handbook of Laser Technology and Applications (Three- Volume Set) |
| Related Links | https://api.taylorfrancis.com/content/chapters/edit/download?identifierName=doi&identifierValue=10.1201/NOE0750309608-88&type=chapterpdf |
| Ending Page | 1662 |
| Page Count | 31 |
| Starting Page | 1632 |
| DOI | 10.1201/noe0750309608-88 |
| Language | English |
| Publisher | Informa UK Limited |
| Publisher Date | 2003-12-01 |
| Access Restriction | Open |
| Subject Keyword | Book Name: Handbook of Laser Technology and Applications (three- Volume Set) Micromachining Extent Invention Staggering Stimulated Microfabrication Ablation Pulsed Spurred |
| Content Type | Text |
| Resource Type | Chapter |